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Tone | Product | Min. FT μm | Max FT μm | Exposure λ | Developer(s) | Data Sheet |
---|---|---|---|---|---|---|
Positive | 0.2 | - | i-line, g-line, broadband | TMAH 0.26N | ||
Positive | 0.2 | - | i-line, g-line, broadband | TMAH 0.26N | ||
Positive | 0.5 | 0.8 | i-line, g-line, broadband | TMAH 0.26N | ||
Positive | 0.8 | 1 | i-line, g-line, broadband | TMAH 0.26N | ||
Positive | 1 | 2 | i-line, g-line, broadband | TMAH 0.26N | ||
Positive | 2.5 | 4 | i-line, g-line, broadband | TMAH 0.26N | ||
Positive | 4 | 7 | i-line, g-line, broadband | TMAH 0.26N | ||
Positive | 6 | 10 | i-line, g-line, broadband | TMAH 0.26N | ||
Positive | 5 | 10 | i-line, g-line, broadband | TMAH 0.26N, Potassium Borates, KOH | ||
Positive | 5 | 25* | i-line, g-line, broadband | TMAH 0.26N, Potassium Borates, KOH | ||
Negative | 2 | 3 | i-line, g-line | TMAH 0.26N, Potassium Borates, KOH | ||
Negative | 3 | 5 | i-line, g-line | TMAH 0.26N, Potassium Borates, KOH | ||
Negative | 4 | 10 | i-line, g-line | TMAH 0.26N, Potassium Borates, KOH | ||
Negative | 2 | 4 | i-line, g-line | TMAH 0.26N, Potassium Borates, KOH | ||
Negative | 3 | 6 | i-line, g-line | TMAH 0.26N, Potassium Borates, KOH | ||
Negative | 5 | 10 | i-line, g-line | TMAH 0.26N, Potassium Borates, KOH | ||
Pos/Neg | 1 | 2 | i-line, g-line, broadband | TMAH 0.26N | ||
Pos/Neg | 1 | 2 | i-line, g-line, broadband | TMAH 0.26N | ||
Negative | 1.5 | 5 | i-line, g-line | HARE SQ Developer | ||
Negative | 4 | 10 | i-line, g-line | HARE SQ Developer | ||
Negative | 5 | 25 | i-line, g-line | HARE SQ Developer | ||
Negative | 10 | 50 | i-line, g-line | HARE SQ Developer | ||
Negative | 25 | 100* | i-line, g-line | HARE SQ Developer | ||
- | - | - | - | - | ||
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