Tone
Product
Min. FT μm
Max FT μm
Exposure λ
Developer(s)
Data Sheet
Positive
0.2
-
i-line, g-line, broadband
TMAH 0.26N
Positive
0.2
-
i-line, g-line, broadband
TMAH 0.26N
Positive
0.5
0.8
i-line, g-line, broadband
TMAH 0.26N
Positive
0.8
1
i-line, g-line, broadband
TMAH 0.26N
Positive
1
2
i-line, g-line, broadband
TMAH 0.26N
Positive
2.5
4
i-line, g-line, broadband
TMAH 0.26N
Positive
4
7
i-line, g-line, broadband
TMAH 0.26N
Positive
6
10
i-line, g-line, broadband
TMAH 0.26N
Positive
5
10
i-line, g-line, broadband
TMAH 0.26N, Potassium Borates, KOH
Positive
5
25*
i-line, g-line, broadband
TMAH 0.26N, Potassium Borates, KOH
Negative
2
3
i-line, g-line
TMAH 0.26N, Potassium Borates, KOH
Negative
3
5
i-line, g-line
TMAH 0.26N, Potassium Borates, KOH
Negative
4
10
i-line, g-line
TMAH 0.26N, Potassium Borates, KOH
Negative
2
4
i-line, g-line
TMAH 0.26N, Potassium Borates, KOH
Negative
3
6
i-line, g-line
TMAH 0.26N, Potassium Borates, KOH
Negative
5
10
i-line, g-line
TMAH 0.26N, Potassium Borates, KOH
Pos/Neg
1
2
i-line, g-line, broadband
TMAH 0.26N
Pos/Neg
1
2
i-line, g-line, broadband
TMAH 0.26N
Negative
1.5
5
i-line, g-line
HARE SQ Developer
Negative
4
10
i-line, g-line
HARE SQ Developer
Negative
5
25
i-line, g-line
HARE SQ Developer
Negative
10
50
i-line, g-line
HARE SQ Developer
Negative
25
100*
i-line, g-line
HARE SQ Developer
-
-
-
-
-