Description

KL5300 series are positive photoresists for use in i-Line, g-Line and broadband applications. They offer high sensitivity, high resolution and excellent process latitude.

• Cover 0.25 – 2.5 µm in a single coat

• Designed for use with industry standard TMAH 0.26N developers

• Achieve resolution 0.55 µm

• Competes with S1805™, S1808™, S1811™, S1813™, S1818™

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Volumes & Customization

Sizes available: 100ml sample, 500ml, 1L, 4L

Production volumes available

Custom thicknesses and formulations are available by request