Image Reversal Resist for High Resolution
KL IR LO Image Reversal Lift-Off
Tone: Positive / Negative
Film Thickness: 1-2 microns
KL IR image reversal series of photoresists are used as either positive and negative photoresist in i-line, g-line and broadband applications. As a negative resist, the KL IR series have excellent thermal stability and are optimized for metallization processes. Develop using standard 0.26N TMAH developers and KL Photoresist Remover or standard NMP removers.
KL IR15: Designed for straight profiles when used as negative photoresist
KL IR LO: Designed for lift-off profiles when used as negative photoresist. Can replace AZ5214E.