Tone: Positive / Negative

Film Thickness: 1-2 microns

Applications: 

KL IR15 image reversal series of photoresists are used as either positive and negative photoresist in i-line, g-line and broadband applications.

IR15: Designed for straight profiles when used as negative photoresist

IR15 Lift-Off: Designed for lift-off profiles when used as negative photoresist