KL IR LO

Image Reversal Lift-Off Resist

Description

KL IR15 image reversal series of photoresists are used as either positive and negative photoresist in i-line, g-line and broadband applications.
 

IR15 LO Lift-Off: Designed for lift-off profiles when used as negative photoresist

  • Competes with AZ® 5214E

 

 

 

 

 

 

 

 

 

 

 

 

 

 

IR15: Designed for straight profiles when used as negative photoresist


 

 

Volumes & Customization

Sizes available: 100ml, 500ml, 1L, 4L

Production volumes available

Custom thicknesses and formulations are available by request

kl ir lift off spin curve
IR15LO Negative pattern, 60d, 1800X, no
IR15LO Negative 3um, 60d, 8KX, no bar.jp