KL5300 General Purpose Positive Photoresist

Tone: Positive

Film Thickness: 0.5 - 2.0 microns

Applications: IC fabrication

 

KL5300 series are positive photoresists for use in i-Line, g-Line and broadband applications. They offer high sensitivity, high resolution and excellent process latitude. They are designed for use with industry standard 0.26 N TMAH developers. Resolution of 0.55 µm can be achieved. 

 

  • Cover 0 – 2.5 µm in a single coat

  • Designed for use with industry standard TMAH 0.26N developers

  • Achieve resolution 0.55 µm

  • Competes with S1805™, S1808™, S1811™, S1813™, S1818™

 

LINK TO PRODUCT PAGE

KL5300 General Purpose Positive Photoresist

$0.00Price
Film Thickness
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Woburn, Massachusetts USA

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