"3-Beam" - The 63rd International Conference On ELECTRON, ION, AND PHOTON BEAM TECHNOLOGY AND NANOFABRICATION
Minneapolis, Minnesota in 2019
http://www.eipbn.org/
The EIPBN Conference is dedicated to lithographic patterning science, nanomanufacturing process technology, and the applications these methods enable. For 62 years and 63 meetings, the conference has brought together engineers and scientists from industries and universities from all over the world to report on and discuss recent progress and future trends.
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