Negative Photoresist with Vertical Profile
KL NPR is a negative tone, novolac photoresist designed for electroplating, metal deposition, TSV, and RIE etch. It has a single coat film thickness of up to 20 µm and features vertical sidewalls and high aspect ratios. KL NPR is thermally stable and can withstand temperatures up to 130⁰C without profile degradation.
Film Thickness: Up to 20 µm (single spin coat)
Sensitivity: Broadband, i-line
Developer: Industry standard TMAH, KOH, etc.
Remover: Industry standard NMP, DMSO, etc.
Volumes & Customization
Sizes available: 100ml sample, 500ml, 1L, 4L
Production volumes available
Custom thicknesses available by request