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Negative Photoresist with Vertical Profile


KL NPR is a negative tone, novolac photoresist designed for electroplating, metal deposition, TSV, and RIE etch. It has a single coat film thickness of up to 20 µm and features vertical sidewalls and high aspect ratios. KL NPR is thermally stable and can withstand temperatures up to 130⁰C without profile degradation.


Tone:                     Negative

Film Thickness:     Up to 20 µm (single spin coat)

Sensitivity:             Broadband, i-line

Developer:             Industry standard TMAH, KOH, etc.

Remover:               Industry standard NMP, DMSO, etc.

Volumes & Customization

Sizes available: 100ml sample, 500ml, 1L, 4L

Production volumes available

Custom thicknesses available by request

k-pro data sheet
negative photoresist spin curve
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